Information for "Physics:Scanning probe lithography"

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Display titlePhysics:Scanning probe lithography
Default sort keyScanning probe lithography
Page length (in bytes)23,982
Namespace ID3020
NamespacePhysics
Page ID443847
Page content languageen - English
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Page creatorimported>Wikisleeper
Date of page creation03:38, 5 February 2024
Latest editorimported>Wikisleeper
Date of latest edit03:38, 5 February 2024
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Scanning probe lithography (SPL) describes a set of nanolithographic methods to pattern material on the nanoscale using scanning probes. It is a direct-write, mask-less approach which bypasses the diffraction limit and can reach resolutions below 10 nm. It is considered an alternative lithographic...
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