Engineering:Journal of Vacuum Science and Technology

Journal of Vacuum Science and Technology  

|Subject |Discipline}}	Physics
Language	English
Edited by	Eray Aydil
Publication details
History	1964–present
Publisher	American Institute of Physics on behalf of the American Vacuum Society (United States)
Frequency	Bimonthly
Impact factor	2.427 (Part A) 1.416 (Part B) (2020)
Standard abbreviations ISO 4 (alt) · Bluebook (alt1 · alt2) NLM (alt) · MathSciNet (alt )
ISO 4	J. Vac. Sci. Technol.
Indexing CODEN · JSTOR (alt) · LCCN (alt) MIAR · NLM (alt) · Scopus
Journal of Vacuum Science and Technology
ISSN	0022-5355
Journal of Vacuum Science and Technology A
CODEN	JVTAD6
ISSN	0734-2101 (print) 1520-8559 (web)
LCCN	83643441
OCLC no.	08697396
Journal of Vacuum Science and Technology B
CODEN	JVTBD9
ISSN	0734-211X
LCCN	83642371
OCLC no.	08697479
Links
Journal homepage Part A Part B

The Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B, by the American Institute of Physics on behalf of the American Vacuum Society. It was established in 1964 and the editor-in-chief is Eray Aydil (University of Minnesota).

History

• 1964–1982 Journal of Vacuum Science and Technology
• 1983–present Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
• 1983–1990 Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
• 1991–present Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Part A

Part A covers applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology. According to the Journal Citation Reports, the journal has a 2015 impact factor of 1.724.

Part B

Part B covers vacuum and plasma processing of various materials, their structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices. According to the Journal Citation Reports, the journal has a 2014 impact factor of 1.398.