Chemistry:Trichlorofluorosilane
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Names | |
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Systematic IUPAC name
Trichloro(fluoro)silane | |
Other names
Silicon trichloride fluoride
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Identifiers | |
ChemSpider | |
PubChem CID
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Properties | |
SiCl3F | |
Molar mass | 153.43 g/mol |
Density | 1.477g/cm3 |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). | |
Infobox references | |
Tracking categories (test):
Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.[1]
References
- ↑ "Preparation of mixed-halogen halo-silanes, US 7030260 B2". https://www.google.com/patents/US7030260. Retrieved 11 October 2013.
Original source: https://en.wikipedia.org/wiki/Trichlorofluorosilane.
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