Template:Microtechnology

From HandWiki

Basic structures

Applications

Sensors	Microbolometer
Actuators	Comb drive Scratch drive actuator Thermal actuator
Switches	Digital micromirror device Optical switch
Other	IBM Millipede RF-MEMS MOEMS Microphotonics Bio-MEMS Microfluidics Micropower

Processes

General	Surface micromachining Bulk micromachining HAR micromachining Deposition Lithography Etching Wire bonding
Specific	LOCOS STI LIGA Lift-off Photolithography SOI Smart Cut

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