Physics:IEEE Transactions on Semiconductor Manufacturing

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IEEE Transactions on Semiconductor Manufacturing  
DisciplineSemiconductor device fabrication
Edited byReha Uzsoy
Publication details
1.336 (2017)
Standard abbreviations
ISO 4IEEE Trans. Semicond. Manuf.
ISSN0894-6507 (print)
1558-2345 (web)
OCLC no.16152423

The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE Computer Society. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement. The editor-in-chief is Reha Uzsoy (North Carolina State University). According to the Journal Citation Reports, the journal has a 2017 impact factor of 1.336.[1]

The journal is a joint publication of the IEEE Solid-State Circuits Society, IEEE Components, Packaging & Manufacturing Technology Society, IEEE Electron Devices Society, and the IEEE Reliability Society.


  1. "IEEE Transactions on Semiconductor Manufacturing". 2017 Journal Citation Reports. Web of Science (Science ed.). Clarivate Analytics. 2018. 

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