Chemistry:Propylene glycol methyl ether acetate
From HandWiki
| Names | |
|---|---|
| Preferred IUPAC name
1-Methoxypropan-2-yl acetate | |
| Other names
PGMEA; 1-methoxy-2-propanyl acetate; PM Acetate; Propylene glycol monomethyl ether acetate
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| Identifiers | |
3D model (JSmol)
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| ChemSpider | |
PubChem CID
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| UNII | |
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| Properties | |
| C6H12O3 | |
| Molar mass | 132.159 g·mol−1 |
| Appearance | Colorless liquid |
| Density | 0.962 g/cm3 |
| Melting point | −67 °C (−89 °F; 206 K) |
| Boiling point | 146 °C (295 °F; 419 K) |
| 23.0g /100mL H2O(25 °C | |
| log P | 0.26[1] |
| Hazards | |
| H226, H402 | |
| NFPA 704 (fire diamond) | |
| Flash point | 45 °C (113 °F; 318 K) |
| 333 °C (631 °F; 606 K) | |
| Explosive limits | 1.5% - 7% |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). | |
| Infobox references | |
Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA,[3] by Shell Chemical under the name methyl proxitol acetate,[4][5] and by Eastman under the name PM Acetate.[6]
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[7] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[8] due to its evaporation into ambient air.
References
- ↑ "1-Methoxy-2-propyl acetate_msds". https://www.chemsrc.com/en/cas/108-65-6_242974.html. Retrieved 28 September 2019.
- ↑ GOV, NOAA Office of Response and Restoration, US. "PROPYLENE GLYCOL METHYL ETHER ACETATE - CAMEO Chemicals - NOAA". http://cameochemicals.noaa.gov/chemical/24058.
- ↑ "Search | Dow Inc.". http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf.
- ↑ "Propylene glycol methyl ether (PGME) and Propylene glycol methyl ether acetate (PGMEA) [MethylPROXITOL and MethylPROXITOL acetate - Product Stewardship Summary"]. Archived from the original on 2014-08-08. https://web.archive.org/web/20140808050817/http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf. Retrieved 2014-08-01.
- ↑ "Shell Glycol Ethers and Acetates". https://www.shell.com/business-customers/chemicals/our-products/solvents-chemical/glycol-ethers.html.
- ↑ "Eastman EastaPure PM Acetate". 23 September 2019. https://www.eastman.com/Literature_Center/F/F346.pdf. Retrieved 23 September 2019.
- ↑ "HMDS primer (hexamethyldisilazane), DEATS and PGMEA". https://www.microsi.com/product-category/lithography/adhesion-promoters/.
- ↑ "Airborne & Surface Molecular Contamination Guidelines". http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf.

